Standard Specifications High precision
Diameter Tolerance φ5-100mm+0/-0.2 φ3-200mm+0/-0.2
Thickness Tolerance 1-50mm+/-0.1 0.02-50mm
Parallelism <1 arc minutes <5 arc seconds
Surface Quality 60/40 40/20
Flatness <λ/4@633nm per 25mm <λ/10@633nm per 25mm
Clear Aperture >90% >95%

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